Electrochemical Double Layer Capacitors

Structured PSi membranes can be used as Electrodes in Electrochemical Double Layer Capacitor (EDLC). SiLiMiXT PSi membranes based EDLC has been tested with capacitance densities higher than 1 mF/cm².

RF inductors on PSi membranes

Integrated Passive Devices (IPD) can be processed at the surface of a lift-able PSi layer before peeling.


Inductors on PSi membranes of 50 µm thick. Made in collaboration with the GREMAN-UMR 7347 Laboratory of the University of Tours (2016).

RF Inductors processed on PSi membranes show highest quality factors than on Si-HR substrates with values comparable with those obtained on quartz substrates.

Electrical characterizations.